Application Note: Using the CAD Import Module to Import a MEMS Pro Layout to COMSOL Multiphysics: Problems and Solutions
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Prepared for CMC Microsystems by Amro Elshurafa, PEng, Department of Electrical & Computer Engineering, Dalhousie University, this application note describes problems and solutions that arise when importing a layout from MEMS Pro to COMSOL Multiphysics, as identified while designing a MEMS actuator for the MEMSCAP PolyMUMPs technology.
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