Design Kit: PolyMUMPs MEMS Process for MEMSPro V7.0

Design Kit: PolyMUMPs MEMS Process for MEMSPro V7.0
Minimum Subscription Required:
Price for Canadian Academics

How to access this item?


PolyMUMPs technology is a triple polysilicon, single metal surface micromachining process with deposited oxide (PSG) as the sacrificial material, and silicon nitride for electrical isolation from the substrate. CMC also offers optional HF release and supercritical carbon dioxide drying.

This technology allows users to develop acoustics, motion sensors, optical MEMS, etc., and micro-assembly.

The design kit for MEMSPro was developed by SoftMEMS LLC and modified by CMC Microsystems to be compatible with CMC design environment.

The items available for download include:

  • design kit with technology file and
  • release notes document.

Licensing Requirements or Restrictions

All CMC Microsystem account holders with a subscription are authorized to access this product. For more information, contact the Licensing Administrator at

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.