Application Note: How to Create a MEMS Pro Design Kit for a MEMS or Microfluidic Process

Application Note: How to Create a MEMS Pro Design Kit for a MEMS or Microfluidic Process
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Description

Prepared by Peng Yang, Staff Scientist, MEMS, CMC Microsystems.Prepared by Peng Yang, Staff Scientist, MEMS, CMC Microsystems. 

This application note provides researchers with guidelines on how to create their own MEMS or microfluidic design kit for MEMS Pro from SoftMEMS. 

This application note describes:

  • The list of required materials to create a MEMS/microfluidic design kit.
  • A step-by-step example showing how to use MEMS Pro to develop a design kit for a simple MEMS process.
  • Tips to ensure a fully functional MEMS/microfluidic design kit.

Licensing Requirements or Restrictions

All CMC Microsystem account holders with a subscription are authorized to access this product. For more information, contact the Licensing Administrator at licensing@cmc.ca.


Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.