Application Note: Using a pcell to Create a Comb Actuator in Cadence Virtuoso

Access Requirements

Description of creating electrostatic comb actuators using a pcell in Cadence Virtuoso

Application Note: Using a pcell to Create a Comb Actuator in Cadence Virtuoso

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Product Details

Description

Product Description

Imed Zine-El-Abidine, Senior Applications Engineer, Microfabrication; and Jim Quinn, Engineer, Prototyping, both of CMC Microsystems.

 

This application note describes how to use a pcell in Cadence Virtuoso to create electrostatic comb actuators. This type of actuator can be fabricated in the PolyMUMPs and SOIMUMPs technologies, offered by CMC Microsystems through its partner MEMSCAP, or using any custom microfabrication process.

 

Items available for download include:

  • application note
  • design file.

 

All CMC Microsystem account holders with a Prototyping or Designer Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.

 

Support

Support Information
Product Specialist:
Version:1.0
Status:Released
Introduction Date:March 31, 2009
Last Updated:January 28, 2011
Support Level:Supported
Delivery Method:CMC Download
Client Access:CMC Download