Application Note: Creating an Electrostatic Zipper Actuator in Cadence Virtuoso
Description of the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso
Minimum Subscription Required:
Prepared by Imed Zine-El-Abidine, Senior Applications Engineer, Microfabrication, CMC Microsystems.
This application note provides the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso. This type of actuator can be built by PolyMUMPs and SOIMUMPs offered by CMC Microsystems; and other custom microfabrication processes.
The intended users of this application note are MEMS designers who wish to use actuators in their device designs.
Items available for download include:
- application note, and
- design file.
All CMC Microsystem account holders with a Prototyping or Designer Subscription are authorized to access this application note. For more information contact Linda Dougherty at firstname.lastname@example.org or 613-530-4787.
|Introduction Date:||May 20, 2009|
|Last Updated:||January 28, 2011|
|Delivery Method:||CMC Download|
|Client Access:||CMC Download|