Application Note: Creating an Electrostatic Zipper Actuator in Cadence Virtuoso

Access Requirements

Description of the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso

Application Note: Creating an Electrostatic Zipper Actuator in Cadence Virtuoso

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Product Details

Description

Product Description

Prepared by Imed Zine-El-Abidine, Senior Applications Engineer, Microfabrication, CMC Microsystems.

 

This application note provides the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso. This type of actuator can be built by PolyMUMPs and SOIMUMPs offered by CMC Microsystems; and other custom microfabrication processes.

 

The intended users of this application note are MEMS designers who wish to use actuators in their device designs.

 

Items available for download include:

  • application note, and
  • design file.

 

All CMC Microsystem account holders with a Prototyping or Designer Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.

 

Support

Support Information
Product Specialist:
Version:1.0
Status:Released
Introduction Date:May 20, 2009
Last Updated:January 28, 2011
Support Level:Supported
Delivery Method:CMC Download
Client Access:CMC Download