User Guide: Generic Micromirror Test Fixture for MEMS Research and Prototyping (ICI-256)

Access Requirements

This document provides a functional overview and basic guide for using the Generic Micromirror Test Fixture for MEMS Research and Prototyping.

User Guide: Generic Micromirror Test Fixture for MEMS Research and Prototyping (ICI-256)

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Product Details

Description

Product Description

Prepared by Peng Yang, Microsystems Scientist, and Patricia Greig, Photonics Lab Engineer, CMC Microsystems.

 

The Generic Micromirror Test Fixture is comprised of a fixture with electrical interface for a user-designed micromirror chip, a laser module, and a position sensing module to control and analyze the chip functionality. This user guide provides a functional overview and basic guide for using the Generic Micromirror Test Fixture for MEMS Research and Prototyping. It complements the user manuals provided by suppliers of the imbedded commercial components in the Generic Micromirror Test Fixture, and includes detailed component configuration information and procedures.

All CMC MIcrosystem account holders with a Prototyping or Designer Subscription are authorized to access this product. Contact licensing@cmc.ca for more information.

Support

Support Information
Product Specialist:
Version:1.1
Status:Released
Introduction Date:November 22, 2010
Last Updated:November 7, 2017
Support Level:Supported
Delivery Method:CMC Download
Client Access:CMC Download