User Guide: Generic Micromirror Test Fixture for MEMS Research and Prototyping (ICI-256)
This document provides a functional overview and basic guide for using the Generic Micromirror Test Fixture for MEMS Research and Prototyping.
Minimum Subscription Required:
Prepared by Peng Yang, Microsystems Scientist, and Patricia Greig, Photonics Lab Engineer, CMC Microsystems.
The Generic Micromirror Test Fixture is comprised of a fixture with electrical interface for a user-designed micromirror chip, a laser module, and a position sensing module to control and analyze the chip functionality. This user guide provides a functional overview and basic guide for using the Generic Micromirror Test Fixture for MEMS Research and Prototyping. It complements the user manuals provided by suppliers of the imbedded commercial components in the Generic Micromirror Test Fixture, and includes detailed component configuration information and procedures.
All CMC MIcrosystem account holders with a Prototyping or Designer Subscription are authorized to access this product. Contact firstname.lastname@example.org for more information.
|Introduction Date:||November 22, 2010|
|Last Updated:||November 7, 2017|
|Delivery Method:||CMC Download|
|Client Access:||CMC Download|