Application Note: Simulating Air-Bridges of CPFC GaN MMIC in Momentum
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Prepared by Imed Zine-El-Abidine, Client Technology Advisor, Microsystems and Nanotechnology, CMC Microsystems.
This application note contains a method on how to model air-bridges in The Canadian Photonics Fabrication Centre (CPFC) GaN MMIC process. It includes a description of how air-bridges are built using the CPFC process. Then a method of altering the layout for the Momentum (ADS) simulator is introduced. The method is illustrated by the substrate data. Finally, the method is supported by the simulated results that compare closely to the measured results.
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