CAD: COMSOL - Plasma Module

CAD: COMSOL - Plasma Module
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Low-temperature plasmas represent the amalgamation of fluid mechanics, reaction engineering, physical kinetics, heat transfer, mass transfer, and electromagnetics. The Plasma Module is a specialized tool for modeling non-equilibrium discharges that occur in a wide range of engineering disciplines. There are specialized modeling interfaces for the most common types of plasma reactors including inductively coupled plasmas (ICP), DC discharges, wave heated discharges (microwave plasmas), and capacitively coupled plasmas (CCP). Modeling the interaction between the plasma and an external circuit is an important part of understanding the overall characteristics of a discharge.

The Plasma Module provides tools to add circuit elements directly to a 1D, 2D, or 3D model, or to import an existing SPICE netlist into the model. The plasma chemistry is specified either by loading in sets of collision cross sections from a file, or by adding reactions and species to the Model Builder. The complicated coupling between the different physics that constitute a plasma is automatically handled by the physics interfaces.

The Plasma Module is designed for researchers, engineers, and experimentalists in the field of plasma science. The Module is accompanied by a suite of tutorial and industrially relevant models, which serve as both instructional examples and a foundation for future work.

Note: To use any of the COMSOL Modules, a COMSOL Multiphysics Base License pass is required. All module software is included with the COMSOL Multiphysics download file, which means you need to download only once.

Licensing Requirements or Restrictions

  • Access is authorized within the geographic boundaries of Canada only.
  • Use of this design tool is restricted to university research only.
  • Faculty with a Professor Research Subscription receive access that allows you, your students, and your research staff to access COMSOL software.
  • Five concurrent use instances per tool from the subscriber’s research team, up to the limits of the available licenses in the shared pool.
  • Access for one year 
  • Acceptance of the vendor licenses terms, including the Academic Addendum, on first use.

For more information, contact the Licensing Administrator at or call 613-530-4787.

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.