Fab: Advanced Micro Foundry (AMF) Silicon Photonics Fabrication Process

Fab: Advanced Micro Foundry (AMF) Silicon Photonics Fabrication Process
Minimum Subscription Required:
Peer Reviewed Price for Canadian Academic
Price for Canadian Academics


Minimum charge is for a 3 x 8 mm2 design. Other design areas can be quoted upon request.


CMC offers this technology through a partnership with Advanced Micro Foundry (AMF).


  • Silicon-on-insulator, 220-nm top Si film, 2000-nm buried oxide (BOX)
  • High resistivity handle wafer (>750 ohm-cm)
  • 193-nm deep UV lithography for waveguides, enabling features down to approximately 140 nm
  • Two partial etches and one full etch of the top silicon
  • 6 implants for optical modulators (P++, P+, P, N++, N+, N)
  • Germanium deposition and implanting for photodetectors
  • Two metal levels, no planarization
  • Front side oxide etch to selectively expose waveguides, e.g. for sensing applications
  • Deep trench with etched facets for edge coupling
  • Supports design and fabrication of a range of components and systems consisting of:
    • modulators
    • detectors
    • waveguides (strip or ridge)
    • gratings for fiber coupling
    • deep trench and nano-tapers for edge coupling
    • multiplexers (diffraction or arrayed waveguide) and filters (resonators, Bragg gratings)
    • ring and disk resonators

Licensing Requirements or Restrictions

Access to this technology is restricted to CMC Microsystems account holders whose organization has a non-disclosure agreement with CMC. The user is bound to maintain in strict confidence the AMF technology information received from CMC. For more information, contact the Licensing Administrator at licensing@cmc.ca or 613-530-4787.

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.