Design Kit: MEMSCAP PiezoMUMPs Design Handbook

Design Kit: MEMSCAP PiezoMUMPs Design Handbook
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PiezoMUMPs Design Handbook is a general-process description and user guide for PiezoMUMPs.

PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.

Licensing Requirements or Restrictions

All CMC Microsystem account holders with a Designer Subscription are authorized to access this technology. Contact the Licensing Administrator at or 613-530-4787 for more information.

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.