Design Kit: MEMSCAP PiezoMUMPs Design Handbook
Minimum Subscription Required:
Price for Canadian Academics
PiezoMUMPs Design Handbook is a general-process description and user guide for PiezoMUMPs.
PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.
Licensing Requirements or Restrictions
All CMC Microsystem account holders with a Designer Subscription are authorized to access this technology. Contact the Licensing Administrator at
or 613-530-4787 for more information.
If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any
publications about your work. For more information, please visit