Standard Operating Procedure: Plasma Preen System
Description
This document provides instructions for operating the Plasma Preen System. The system is connected to an oxygen tank located outside the lab in the service area. Oxygen plasma treatment can remove organic materials such as photoresists or solvent residue from the surface that is being treated.
Licensing Requirements or Restrictions
All CMC Microsystem account holders are authorized to access this document.
Acknowledging CMC
If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any
publications about your work. For more information, please visit
Acknowledge CMC.