User Guide: Open-Gate Silicon JFET Transistors: Technology Platform for Integration of Microelectronics with Soft Materials (ICI-364)
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This document describes a platform technology that uses open-gate silicon junction field effect transistors (OG Si-JFET or simply, Si-JFET) to enable on-chip integration of functional soft materials with microelectronics. The transistors are fabricated without the top gate electrode, such that a transducing soft material can be applied in the place of the gate during post processing. A transducing layer that generates a voltage at its interface with the Si-JFET can be used to control its junction electrostatics. In particular, depending on the response of the soft material to the signal of interest, the conductivity of the silicon channel will in turn be modulated in by the signal.
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