Application Note: Using Micromachining to Integrate RF MEMS Variable Capacitors in Conventional TSMC 0.35-µm CMOS Technology

Access Requirements

Description of integration of RF MEMS variable capacitors in conventional TSMC 0.35um CMOS technology

Application Note: Using Micromachining to Integrate RF MEMS Variable Capacitors in Conventional TSMC 0.35-µm CMOS Technology

Minimum Subscription Required: Research

Buy a Subscription  to connect with information, tools, services and price discounts not otherwise available.

Product Details

Description

Product Description

This application note was developed in conjunction with Dr. Raafat Mansour, Professor, Electrical and Computer Engineering, University of Waterloo. There is a continuing demand to integrate a complete transceiver for numerous applications including various types of wireless sensor networks (e.g., patient monitoring network), and wireless implantable devices.

 

This high level of integration for RF applications requires high Q (quality) on-chip components. A solution to this problem is to create MEMS tunable passive components within the CMOS metallization layers. The objective of the project that led to this application note is to create MEMS tunable capacitors and utilize them in tunable filter, tunable bandpass amplifier, and VCO circuits.

 

CMC is collaborating with researchers at Canadian universities to build a library of microsystems application notes. These documents are intended to help extend microsystems research in Canada by describing new techniques, processes, and design tools relating to microsystems, and to help stimulate new ideas that accelerate research and development activities.

 

All CMC Microsystem account holders with a Prototyping or Designer Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.

Support

Support Information
Product Specialist:
Version:1.0
Status:Released
Introduction Date:October 12, 2006
Last Updated:October 20, 2020
Support Level:Supported
Delivery Method:CMC Download
Client Access:CMC Download