Application Note: How to Create a MEMS Pro Design Kit for a MEMS or Microfluidic Process
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Prepared by Peng Yang, Staff Scientist, MEMS, CMC Microsystems.Prepared by Peng Yang, Staff Scientist, MEMS, CMC Microsystems.
This application note provides researchers with guidelines on how to create their own MEMS or microfluidic design kit for MEMS Pro from SoftMEMS.
This application note describes:
- The list of required materials to create a MEMS/microfluidic design kit.
- A step-by-step example showing how to use MEMS Pro to develop a design kit for a simple MEMS process.
- Tips to ensure a fully functional MEMS/microfluidic design kit.
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