Application Note: Creating an Electrostatic Zipper Actuator in Cadence Virtuoso
Access Requirements
Description of the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso
Minimum Subscription Required:
Research
Buy a Subscription
to connect with information, tools, services and price discounts not otherwise available.
Product Details
Description
Product Description
Prepared by Imed Zine-El-Abidine, Senior Applications Engineer, Microfabrication, CMC Microsystems.
This application note provides the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso. This type of actuator can be built by PolyMUMPs and SOIMUMPs offered by CMC Microsystems; and other custom microfabrication processes.
The intended users of this application note are MEMS designers who wish to use actuators in their device designs.
Items available for download include:
- application note, and
- design file.
All CMC Microsystem account holders with a Prototyping or Designer Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.
Support
Support Information
Product Specialist: | |
Version: | 1.0 |
Status: | Released |
Introduction Date: | May 20, 2009 |
Last Updated: | February 19, 2021 |
Support Level: | Supported |
Delivery Method: | CMC Download |
Client Access: | CMC Download |