Design Kit: PolyMUMPs MEMS Process for CoventorWare

Design Kit: PolyMUMPs MEMS Process for CoventorWare
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This release contains the design kit for MEMSCAP PolyMUMPs fabrication process and CoventorWare design tool. This kit was developed by Coventor Inc. and modified by CMC Microsystems to be compatible with CMC design environment. The PolyMUMPs users who use the CoventorWare as their design tool are strongly recommended to use this design kit to avoid design failure due to design file translation.

Licensing Requirements or Restrictions

All CMC Microsystems account holders with a Professor Research Subscription are authorized to access this technology. Contact the Licensing Administrator at or 613-530-4787 for more information.

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.