Fab: MEMSCAP Post-Processing for PolyMUMPs

Fab: MEMSCAP Post-Processing for PolyMUMPs
Minimum Subscription Required:
Research
Peer Reviewed Price for Canadian Academic
$150.00
Price for Canadian Academics
$800.00

Description

In partnership with MEMSCAP Inc., CMC offers users access to the PolyMUMPs technology.PolyMUMPs technology is a triple polysilicon, single metal surface micromachining process with deposited oxide (PSG) as the sacrificial material, and silicon nitride for electrical isolation from the substrate. Post processing for PolyMUMPS offers optional HF release and supercritical carbon dioxide drying.

  

This technology allows users to develop acoustics, motion sensors, optical MEMS, etc. and micro-assembly.

 

For more information contact Sarah Neville at fab@cmc.ca or 613-530-4655.

Licensing Requirements or Restrictions

Please see Help with Licensing to review licensing procedure. For more information, contact our License Administrator at licensing@cmc.ca or 613-530-4787.

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.