Fab: MEMSCAP Post-Processing for PolyMUMPs
Minimum Subscription Required:
Peer Reviewed Price for Canadian Academic
Price for Canadian Academics
In partnership with MEMSCAP Inc., CMC offers users access to the PolyMUMPs technology.PolyMUMPs technology is a triple polysilicon, single metal surface micromachining process with deposited oxide (PSG) as the sacrificial material, and silicon nitride for electrical isolation from the substrate. Post processing for PolyMUMPS offers optional HF release and supercritical carbon dioxide drying.
This technology allows users to develop acoustics, motion sensors, optical MEMS, etc. and micro-assembly.
For more information contact Sarah Neville at email@example.com or 613-530-4655.
Licensing Requirements or Restrictions
Please see Help with Licensing
to review licensing procedure. For more information, contact our License Administrator at firstname.lastname@example.org
If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any
publications about your work. For more information, please visit