Design Handbook: Micralyne MicraGEM-Si™ (ICI-319)

Design Handbook: Micralyne MicraGEM-Si™ (ICI-319)
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Micralyne MicraGEM-Si is a silicon-on-insulator (SOI) based MEMS process for manufacturing devices such as micromirrors, optical switches, resonators, inertial, and bio sensors.

MicraGEM-Si is being offered as Multi-Project-Wafer (MPW) service through CMC Microsystems and is available for both academic and industrial R&D. Together CMC and Micralyne offer a seamless path from MPW design confirmation to volume manufacturing.


  • Two thick SOI structure layers with up to three functional levels of silicon thickness option
  • Gold thin film on top surface for highly reflective mirror and electrical pads
  • Available in sizes 4 mm x 4 mm, 4 mm x 8 mm, and 8 mm x 8 mm

This Design Handbook contains technology summary and the design rules of the MicraGEM-Si process.

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All CMC Microsystem account holders with a Professor Research Subscription are authorized to access this application note. For more information, contact our Licensing Administrator at or 613-530-4787.

Acknowledging CMC

If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any publications about your work. For more information, please visit Acknowledge CMC.