User Guide: Kurt J. Lesker PVD 75 Physical Vapour Deposition (Sputter) System
This document provides sputtering process information for targets available at NanoFabrication Kingston (NFK), as determined using a Kurt J. Lesker PVD 75 Physical Vapour Deposition (Sputter) System.
Licensing Requirements or Restrictions
All CMC Microsystem account holders are authorized to access this document.
If your research benefits from products and services provided by CMC Microsystems, please acknowledge this support in any
publications about your work. For more information, please visit